a method of implanting impurities below the surface of a solid, usually a semiconductor, by bombarding the solid with a beam of ions of the impurity.
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Origin of ion implantation
First recorded in 1960–65
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British Dictionary definitions for ion implantation
a technique used in the manufacture of semiconductor devices in which impurities are implanted by means of beams of electrically accelerated ions
Collins English Dictionary - Complete & Unabridged 2012 Digital Edition © William Collins Sons & Co. Ltd. 1979, 1986 © HarperCollins Publishers 1998, 2000, 2003, 2005, 2006, 2007, 2009, 2012