- a method of implanting impurities below the surface of a solid, usually a semiconductor, by bombarding the solid with a beam of ions of the impurity.
Origin of ion implantation
First recorded in 1960–65
Dictionary.com Unabridged Based on the Random House Unabridged Dictionary, © Random House, Inc. 2018
- a technique used in the manufacture of semiconductor devices in which impurities are implanted by means of beams of electrically accelerated ions