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planar process

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noun
a method of producing diffused junctions in semiconductor devices. A pattern of holes is etched into an oxide layer formed on a silicon substrate, into which impurities are diffused through the holes
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Collins English Dictionary - Complete & Unabridged 2012 Digital Edition © William Collins Sons & Co. Ltd. 1979, 1986 © HarperCollins Publishers 1998, 2000, 2003, 2005, 2006, 2007, 2009, 2012
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