1. the technique or art of making photolithographs.
  2. Electronics. a process whereby integrated and printed circuits are produced by photographing the circuit pattern on a photosensitive substrate and chemically etching away the background.

Origin of photolithography

First recorded in 1855–60; photo- + lithography
Related formspho·to·lith·o·graph·ic [foh-tuh-lith-uh-graf-ik] /ˌfoʊ təˌlɪθ əˈgræf ɪk/, adjectivepho·to·li·thog·ra·pher, noun Unabridged Based on the Random House Unabridged Dictionary, © Random House, Inc. 2018

Examples from the Web for photolithography

Historical Examples of photolithography

British Dictionary definitions for photolithography


  1. a lithographic printing process using photographically made platesOften shortened to: photolitho (ˌfəʊtəʊˈlaɪθəʊ)
  2. electronics a process used in the manufacture of semiconductor devices, thin-film circuits, optical devices, and printed circuits in which a particular pattern is transferred from a photograph onto a substrate, producing a pattern that acts as a mask during an etching or diffusion processSee also planar process
Derived Formsphotolithographer, nounphotolithographic (ˌfəʊtəʊˌlɪθəˈɡræfɪk), adjectivephotolithographically, adverb
Collins English Dictionary - Complete & Unabridged 2012 Digital Edition © William Collins Sons & Co. Ltd. 1979, 1986 © HarperCollins Publishers 1998, 2000, 2003, 2005, 2006, 2007, 2009, 2012